PTFE Carriers
For Wafers and Substrates |
Featuring Single-Piece
Construction |
Custom Engineered PTFE carriers for wafers,
substrates, flat panel displays, liquid crystal displays, and optical discs.
 Featuring single-piece construction, these PTFE Carriers outlast
fabricated or assembled cassettes because there are no pins, screws, or dovetails that can
loosen and trap impurities or slow down critical processes. Machined to specification,
PTFE carriers are available in standard, megasonic, and mask styles.Compatible
with all types of equipment, PTFE Carriers won't absorb and store contaminating fluids or
liquids and can be rinsed clean with deionized water. Their inherent low coefficient of
friction virtually eliminates particle shedding and contamination from carrier contact
and, of course PTFE is chemically inert and unaffected by acids, alkalis,
and all solvents below 300°C. |
Key Features
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Chemically inert and operate from -240°C to +240°C |
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Machine compatible SEMI standard, megasonic, and mask styles |
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Precisely machined with customer required slot spacing |
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Fully dense and free of microvoids and microporosity |
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Can withstand ultrasonic cleaning and prebake operations |
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Single-piece molded and machined construction |
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Teflon® tanks and special handles can also be
fabricated |
Machine Compatible PTFE Carriers
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SEMI wafer carriers to 300mm |
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Mask, LCD, and FPD carriers to 450mm |
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Larger carriers of all types are being developed |
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Can provide additional supports for centrifuge application |
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Horizontal Carrier Registration: "H-Bar"
configuration ensures placement on stationary or elevator platforms |
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Vertical Carrier Registration: "Center alignment"
feature on carrier legs |
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Low and High Profile Configurations: 20 wafer pockets to
first pocket specifications with 6.35mm spacing; 25 wafer pockets to first pocket
specifications with 4.76mm spacing; wafer pocket design and slot spacing to customer
specifications |
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Options
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Handling slots |
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Flow-thru slots |
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Pick-Up flanges |
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Transfer pin holes |
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PTFE handles available in many sizes or custom designed to
suit special applications |
PTFE Characteristics
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Zero Moisture Absorption: <0.01 over 24 hrs. |
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Low Coefficient of Friction: .05-.08 static against polished
steel |
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Chemically Inert and Corrosion-Resistant: Excellent
resistance to all chemicals except fluorine, which is considered good |
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High Service Temperature: 240°C Maximum continuous, 320°
to 340°C melting point |
Custom Engineered PTFE Carriers
Carriers can be custom designed to handle all sizes, styles, configurations and
applications. Multiple size wafers can be accommodated in one carrier; one size outside
and another size inside. For example, one carrier can be fabricated to hold both 5"
and 6" wafers or one carrier with a 6" carrier outside contour can be designed
to handle 5" wafers to accommodate a process.
Other Materials Available
Carbon graphite/PTFE compounds, Polyimide, Nylon, Acetal, PEEK, PTFM, and other
engineering-grade plastics. |
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